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https://ptsldigital.ukm.my/jspui/handle/123456789/587014| Title: | Borophosphosilicate Glass (BPSG) Reflow Characterization for Submicron CMOS Technology : Pencirian Kaca Borophosphosilicat (BPSG) bagi Teknologi Submikron CMOS |
| Authors: | Nik Hazura N. Hamat Ramzan Mat Ayub Uda Hashim |
| Keywords: | Borophosphosilicate Glass BPSG CMOS Technology Teknologi Submikron CMOS |
| Issue Date: | 2007 |
| News Source: | Sains Malaysiana |
| ISSN: | 0126-6039 |
| Call Number: | Siri Q1.S23 |
| Publisher: | Penerbit UKM |
| Appears in Collections: | UKM Journal Article / Artikel Jurnal UKM |
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