Please use this identifier to cite or link to this item: https://ptsldigital.ukm.my/jspui/handle/123456789/587014
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dc.contributor.authorNik Hazura N. Hamat-
dc.contributor.authorRamzan Mat Ayub-
dc.contributor.authorUda Hashim-
dc.date.accessioned2023-11-06T08:49:06Z-
dc.date.available2023-11-06T08:49:06Z-
dc.date.issued2007-
dc.identifier.issn0126-6039-
dc.identifier.otherukmvital:12115-
dc.identifier.urihttps://ptsldigital.ukm.my//jspui/handle/123456789/587014-
dc.language.isoen-
dc.publisherPenerbit UKM-
dc.relation.haspartSains Malaysiana-
dc.relation.urihttp://journalarticle.ukm.my,http://www.ukm.my/jsm/-
dc.subjectBorophosphosilicate Glass-
dc.subjectBPSG-
dc.subjectCMOS Technology-
dc.subjectTeknologi Submikron CMOS-
dc.titleBorophosphosilicate Glass (BPSG) Reflow Characterization for Submicron CMOS Technology : Pencirian Kaca Borophosphosilicat (BPSG) bagi Teknologi Submikron CMOS-
dc.typeJournal Article-
dc.identifier.callnoSiri Q1.S23-
Appears in Collections:UKM Journal Article / Artikel Jurnal UKM

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