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https://ptsldigital.ukm.my/jspui/handle/123456789/519253
Title: | Low-G area-changed MEMs accelerometer with bulk silicon technique : design, simulation and testing |
Authors: | Badariah Bais |
Keywords: | Accelerometers Microelectromechanical systems |
Issue Date: | 2007 |
Call Number: | Badariah Bais |
Publisher: | UKM, Bangi |
Appears in Collections: | Institute of Microengineering and Nanoelectronics / Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN) |
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