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  2. PHD Thesis / Tesis PHD
  3. Institute of Microengineering and Nanoelectronics / Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN)
Please use this identifier to cite or link to this item: https://ptsldigital.ukm.my/jspui/handle/123456789/519253
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dc.contributor.authorBadariah Bais-
dc.date.accessioned2023-10-17T08:11:29Z-
dc.date.available2023-10-17T08:11:29Z-
dc.date.issued2007-
dc.identifier.otherukmvital:3172-
dc.identifier.urihttps://ptsldigital.ukm.myjspui/handle/123456789/519253-
dc.language.isoeng-
dc.publisherUKM, Bangi-
dc.relationInstitute of Microengineering and Nanoelectronics / Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN)-
dc.rightsUKM-
dc.subjectAccelerometers-
dc.subjectMicroelectromechanical systems-
dc.titleLow-G area-changed MEMs accelerometer with bulk silicon technique : design, simulation and testing-
dc.typetheses-
dc.identifier.callnoBadariah Bais-
Appears in Collections:Institute of Microengineering and Nanoelectronics / Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN)

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