Please use this identifier to cite or link to this item:
https://ptsldigital.ukm.my/jspui/handle/123456789/519253| Title: | Low-G area-changed MEMs accelerometer with bulk silicon technique : design, simulation and testing |
| Authors: | Badariah Bais |
| Keywords: | Accelerometers Microelectromechanical systems |
| Issue Date: | 2007 |
| Call Number: | Badariah Bais |
| Publisher: | UKM, Bangi |
| Appears in Collections: | Institute of Microengineering and Nanoelectronics / Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN) |
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