Please use this identifier to cite or link to this item:
https://ptsldigital.ukm.my/jspui/handle/123456789/519127| Title: | Sputtered silicon encapsulation : wafer level packaging for MEMs devices |
| Authors: | Azrul Azlan Hamzah |
| Keywords: | Microelectromechanical systems Microelectronic Microelectronic packaging |
| Issue Date: | 2008 |
| Call Number: | TK7874.A9978 2008 |
| Publisher: | UKM, Bangi |
| Appears in Collections: | Institute of Microengineering and Nanoelectronics / Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN) |
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