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https://ptsldigital.ukm.my/jspui/handle/123456789/519120
Title: | Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMs |
Authors: | Norhayati Soin |
Keywords: | Diaphragm (Mechanical devices) - Design and construction Microelectromechanical systems |
Issue Date: | 2006 |
Call Number: | TJ247.N676 2006 |
Publisher: | UKM, Bangi |
Appears in Collections: | Faculty of Engineering and Built Environment / Fakulti Kejuruteraan dan Alam Bina |
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