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Title: | Akselerometer MEMs kapasitif dengan daya pengimbang elektrostatik untuk kegunaan G rendah |
Authors: | Ahmad Alabqari Ma'radzi |
Keywords: | Microelectromechanical systems |
Issue Date: | 2007 |
Call Number: | TK7875.A366 2007 |
Publisher: | UKM, Bangi |
Appears in Collections: | Institute of Microengineering and Nanoelectronics / Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN) |
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