Please use this identifier to cite or link to this item: https://ptsldigital.ukm.my/jspui/handle/123456789/474748
Title: Akselerometer MEMs kapasitif dengan daya pengimbang elektrostatik untuk kegunaan G rendah
Authors: Ahmad Alabqari Ma'radzi
Keywords: Microelectromechanical systems
Issue Date: 2007
Call Number: TK7875.A366 2007
Publisher: UKM, Bangi
Appears in Collections:Institute of Microengineering and Nanoelectronics / Institut Kejuruteraan Mikro dan Nanoelektronik (IMEN)

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