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Please use this identifier to cite or link to this item: https://ptsldigital.ukm.my/jspui/handle/123456789/519120
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dc.contributor.authorNorhayati Soin-
dc.date.accessioned2023-10-17T08:11:03Z-
dc.date.available2023-10-17T08:11:03Z-
dc.date.issued2006-
dc.identifier.otherukmvital:436-
dc.identifier.urihttps://ptsldigital.ukm.my/jspui/handle/123456789/519120-
dc.language.isomay-
dc.publisherUKM, Bangi-
dc.relationFaculty of Engineering and Built Environment / Fakulti Kejuruteraan dan Alam Bina-
dc.rightsUKM-
dc.subjectDiaphragm (Mechanical devices) - Design and construction-
dc.subjectMicroelectromechanical systems-
dc.titleRekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMs-
dc.typetheses-
dc.identifier.callnoTJ247.N676 2006-
Appears in Collections:Faculty of Engineering and Built Environment / Fakulti Kejuruteraan dan Alam Bina

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