Please use this identifier to cite or link to this item:
https://ptsldigital.ukm.my/jspui/handle/123456789/457915| Title: | Kajian punaran basah tidak isotropik secara eksperimen untuk fabrikasi membran silikon |
| Authors: | Mimiwaty Mohd Noor |
| Keywords: | Plasma etching Silicon - Etching |
| Issue Date: | 2004 |
| Call Number: | TK7871.15.S55M55 2004 |
| Publisher: | UKM, Bangi |
| Appears in Collections: | Faculty of Engineering and Built Environment / Fakulti Kejuruteraan dan Alam Bina |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| ukmvital_1558+Source+Source.0.PDF Restricted Access | 15.28 MB | Adobe PDF |  View/Open |
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