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Please use this identifier to cite or link to this item: https://ptsldigital.ukm.my/jspui/handle/123456789/457915
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dc.contributor.authorMimiwaty Mohd Noor
dc.date.accessioned2023-09-12T09:15:29Z-
dc.date.available2023-09-12T09:15:29Z-
dc.date.issued2004
dc.identifier.otherukmvital:1558
dc.identifier.urihttps://ptsldigital.ukm.my/jspui/handle/123456789/457915-
dc.language.isomay
dc.publisherUKM, Bangi
dc.relationFaculty of Engineering and Built Environment / Fakulti Kejuruteraan dan Alam Bina
dc.rightsUKM
dc.subjectPlasma etching
dc.subjectSilicon - Etching
dc.titleKajian punaran basah tidak isotropik secara eksperimen untuk fabrikasi membran silikon
dc.typetheses
dc.identifier.callnoTK7871.15.S55M55 2004
Appears in Collections:Faculty of Engineering and Built Environment / Fakulti Kejuruteraan dan Alam Bina

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