Please use this identifier to cite or link to this item: https://ptsldigital.ukm.my/jspui/handle/123456789/587582
Title: Fabrication of Silicon Oxide Nanodot Arrays by Scanning Probe Lithography
Authors: Khatijah A. Yaacob
Sabar D. Hutagalung
Teguh Darsono
Keywords: Atomic force microscope
Nanodot
Scanning probe lithograpy
Silicon oxide
Tip voltage
Issue Date: 2008
News Source: Sains Malaysiana
ISSN: 0126-6039
Call Number: Siri Q1.S23
Publisher: Penerbit UKM
Appears in Collections:UKM Journal Article / Artikel Jurnal UKM

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