Please use this identifier to cite or link to this item: https://ptsldigital.ukm.my/jspui/handle/123456789/587468
Title: Optimization of titanium silicide formation on boron doped silicon using statistical design
Authors: Abu Hassan Shaari
Burhanuddin Yeop Majlis
Uda Hashim.
Keywords: Boron Doped Silicon
Statistical Design
Titanium Silicide Formation
Issue Date: 2000
News Source: Sains Malaysiana
ISSN: 0126-6039
Call Number: Siri Q1.S23
Publisher: Penerbit UKM
Appears in Collections:UKM Journal Article / Artikel Jurnal UKM

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