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https://ptsldigital.ukm.my/jspui/handle/123456789/586694Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Bahram Azizollah Ganji | - |
| dc.contributor.author | Burhanuddin Yeop Majlis | - |
| dc.date.accessioned | 2023-11-06T08:42:39Z | - |
| dc.date.available | 2023-11-06T08:42:39Z | - |
| dc.date.issued | 2009 | - |
| dc.identifier.issn | 0126-6039 | - |
| dc.identifier.other | ukmvital:11870 | - |
| dc.identifier.uri | https://ptsldigital.ukm.my//jspui/handle/123456789/586694 | - |
| dc.language.iso | en | - |
| dc.publisher | Penerbit UKM | - |
| dc.relation.haspart | Sains Malaysiana | - |
| dc.relation.uri | http://journalarticle.ukm.my,http://www.ukm.my/jsm/ | - |
| dc.subject | Almask | - |
| dc.subject | deep trench | - |
| dc.subject | deep trenches ion etching | - |
| dc.subject | etch rate | - |
| dc.subject | silicon structure | - |
| dc.title | Fabrication of deep trenches in silicon wafer using deep reactive ion etching with aluminium mask | - |
| dc.type | Journal Article | - |
| dc.identifier.callno | Siri Q1.S23 | - |
| Appears in Collections: | UKM Journal Article / Artikel Jurnal UKM | |
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