Please use this identifier to cite or link to this item: https://ptsldigital.ukm.my/jspui/handle/123456789/586614
Title: Statistical Design of Ultra-Thin SiO2 for Nanodevices
Authors: Abul Fatah M.F.A
Ahmad I
Hashim.U
Keywords: CMOS
get dielektrik
get oksida ultranipis
kaedah taguchi
mikroskop daya atom AFM
Issue Date: 2009
News Source: Sains Malaysiana
ISSN: 0126-6039
Call Number: Siri Q1.S23
Publisher: Penerbit UKM
URI: https://ptsldigital.ukm.my//jspui/handle/123456789/586614
Appears in Collections:UKM Journal Article / Artikel Jurnal UKM

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