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MIKROFON KAPASITIF MEMS BERASASKANSILIKON KARBIDA (SiC) .pdf.jpg2021-07-23Mikrofon kapasitif mems berasaskan silikon karbida (SiC) untuk aplikasi julat frekuensi ultrasonikAzrul Azlan Hamzah, Prof. Dr.; Siti Aisyah Zawawi; P84255
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